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Nanobenders: efficient piezoelectric actuators for widely tunable nanophotonics at CMOS-level voltages

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Abstract

We introduce a compact (~ 10 pm2) piezoelectric actuator, and use it to tune the optical resonance wavelength of a lithium niobate photonic crystal cavity by ~ 5 nm/V. The tuning range is 1520-1560 nm with 4 V.

© 2020 The Author(s)

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