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Hybrid Integration of High-Q Chalcogenide Microring Resonators on Silicon-on-insulator

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Abstract

We demonstrate novel on-chip chalcogenide microresonators directly inte grated on the silicon-on-insulator platform using an etchless fabrication method and thermal dewetting. A high Q greater than 4.6 × 105 is measured at telecommunication wavelengths.

© 2020 The Author(s)

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