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Conferences > CLEO_SI > 2020 > STh1F > STh1F.3

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Mikhail Churaev, Simon Honl, Rui Ning Wang, Charles Mohl, Tianyi Liu, J. Connor Skehan, Johann Riemensberger, Daniele Caimi, Junqiu Liu, Paul Seidler, and Tobias J. Kippenberg

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Abstract

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid X(2)-X(3) microresonators with Q " 106, as well as integrated travelling wave EO modulators.

© 2020 The Author(s)

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