Laser-Written Silicon-Germanium Alloy Microstructures with Tunable Compositionally Graded Profiles

Ozan Aktas; Stuart J. MacFarquhar; Swe Z. Oo; Swe Z. Oo; Vinita Mittal; Harold M. H. Chong; Harold M. H. Chong; Anna C. Peacock

doi:10.1364/CLEO_SI.2020.SF2R.5

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2020),
paper SF2R.5
•https://doi.org/10.1364/CLEO_SI.2020.SF2R.5

Laser-Written Silicon-Germanium Alloy Microstructures with Tunable Compositionally Graded Profiles

Ozan Aktas, Stuart J. MacFarquhar, Swe Z. Oo, Vinita Mittal, Harold M. H. Chong, and Anna C. Peacock

CLEO: Science and Innovations 2020

Washington, DC United States
10–15 May 2020
ISBN: 978-1-943580-76-7

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Light Manipulation with Laser Writing and Lithography/Patterning (SF2R)

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O. Aktas, S. J. MacFarquhar, S. Z. Oo, V. Mittal, H. M. H. Chong, and A. C. Peacock, "Laser-Written Silicon-Germanium Alloy Microstructures with Tunable Compositionally Graded Profiles," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optica Publishing Group, 2020), paper SF2R.5.

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Abstract

A laser processing method is introduced for post-deposition tailoring of local composition and bandgap in amorphous silicon-germanium thin films on silicon substrates. Spatial distribution of the alloy constituents can be controlled through the scan speed.

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