Metasurface Manufacturing on 300-mm Wafer Platforms

Nanxi Li; Zhengji Xu; Yuan Dong; Ting Hu; Qize Zhong; Yuan Hsing Fu; Shiyang Zhu; Navab Singh

doi:10.1364/CLEO_SI.2020.SF1J.6

Abstract

The CMOS-compatible flat optics fabrication platforms developed within the Institute of Microelectronics (IME) for multi-purpose wafers have been presented. The work aims to drive the flat optics towards the mass-manufacturing and commercialization.

PDF Article | Presentation Video

More Like This

CMOS-Compatible Metasurface-based Subtractive Color Filters on a 300-mm Glass Wafer

Zhengji Xu, Nanxi Li, Yuan Dong, Ting Hu, Qize Zhong, Wei Kang, Yanyan Zhou, Dongdong Li, Yuan Hsing Fu, Qunying Lin, Shiyang Zhu, and Navab Singh
JTu2B.28 CLEO: Applications and Technology (CLEO:A&T) 2020

Recent Progress in Silicon Photonics R&D and Manufacturing on 300mm Wafer Platform

F. Boeuf, S. Cremer, E. Temporiti, M. Fere’, M. Shaw, N. Vulliet, B. Orlando, D. Ristoiu, A. Farcy, T. Pinguet, A. Mekis, G. Masini, P. Sun, Y. Chi, H. Petiton, S. Jan, J. R. Manouvrier, C. Baudot, P. Le Maitre, J-F. Carpentier, L. Salager, M. Traldi, L. Maggi, D. Rigamonti, C. Zaccherini, C. Elemi, B. Sautreuil, and L. Verga
W3A.1 Optical Fiber Communication Conference (OFC) 2015

Metasurface Beam Deflector Array on a 12-inch Glass Wafer

Nanxi Li, Yuan Hsing Fu, Yuan Dong, Ting Hu, Zhengji Xu, Qize Zhong, Dongdong Li, Yanyan Zhou, Keng Heng Lai, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, and Navab Singh
W2A.9 Optical Fiber Communication Conference (OFC) 2020

Previous Article Next Article

Presentation Video

Presentation video access is available to:

Optica Publishing Group subscribers
Technical meeting attendees
Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads