Abstract
We report the design and characterization of high frequency, resonant acousto-optic modulators in a MEMS foundry process. The doubly-resonant cavity design allows us to measure acousto-optic modulation at frequencies upto 4 GHz with high modulation efficiency (Vπ≈ 350mV, fres≈2 GHz).
© 2019 The Author(s)
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