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Conferences > CLEO_SI > 2019 > STh1O > STh1O.5

Large-area, single material metalens in the visible: An approach for mass-production using conventional semiconductor manufacturing techniques

Joon-Suh Park, Shuyan Zhang, Alan She, Wei-Ting Chen, Kerolos M. A. Yousef, and Federico Capasso

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Abstract

We present mass-producible, large area, single-material metalens working in the visible wavelength, using conventional deep-ultraviolet (DUV) stepper lithography technique. Having a diameter of 1 cm, our present lens show polarization independent, near-diffraction limited focusing behavior.

© 2019 The Author(s)

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