Abstract

We demonstrate high-confinement Si3N4 resonators with intrinsic quality factor more than 1 million using standard PECVD process. We show that by addressing scattering, the loss at 1.6 μm can be as low as 0.4 dB/cm.

© 2019 The Author(s)

PDF Article
More Like This
High Quality Factor Si3N4 Ring Resonators Achieved by Surface Roughness Reduction

Xingchen Ji, Felippe A. S. Barbosa, Alex Bryant, Jaime Cardenas, Samantha P. Roberts, and Michal Lipson
SM2R.3 CLEO: Science and Innovations (CLEO_SI) 2016

High-yield ultra-low losses Si3N4 microresonators for energy-efficient nonlinear photonics

L. Youssef, H. El Dirani, C. Petit-Etienne, S. Kerdiles, P. Grosse, C. Sciancalepore, and E. Pargon
FTh3C.5 Frontiers in Optics (FiO) 2019

A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation

Sandeep S. Saseendran, Tangla D. Kongnyuy, Bruno Figeys, Federico Buja, Benedetto Troia, Sarp Kerman, Aleksandrs Marinins, Roelof Jansen, Xavier Rottenberg, Deniz S. Tezcan, and Philippe Soussan
M1C.4 Optical Fiber Communication Conference (OFC) 2019

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription