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Conferences > CLEO_SI > 2018 > SW4B > SW4B.6

High-Quality Hybrid Double-layer-Silicon on Silicon Nitride Platform for Integrated Photonic Applications

Tianren Fan, Hesam Moradinejad, Amir H. Hosseinnia, Xi Wu, Ali A. Eftekhar, and Ali Adibi

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Abstract

We demonstrate a hybrid double-layer-crystalline-silicon on silicon nitride platform formed by a two-step of bonding process. We report high Q of 400,000 for a 40 μm radius microresonator in the platform using evanescent coupling between different layers.

© 2018 The Author(s)

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