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Conferences > CLEO_SI > 2018 > STu3N > STu3N.1

Gas Sensing Using Heterogeneously Integrated Quantum Cascade Lasers on Silicon

Christopher C. Evans, Alexander Spott, Charles D. Merritt, William W. Bewley, Igor Vurgaftman, Chul Soo Kim, Jerry R. Meyer, Joel M. Hensley, John E. Bowers, and Michael B. Frish

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Abstract

We demonstrate tunable diode-laser absorption spectroscopy (TDLAS) gas sensing near 4.8 µm using a distributed-feedback quantum cascade laser heterogeneously integrated on a silicon-on-nitride-on-insulator platform. This platform enables sensors operating at wavelengths up to 6.7 μm.

© 2018 The Author(s)

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