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Low Loss Silicon-Rich Silicon Nitride for Nonlinear Optics

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Abstract

We demonstrate low loss (~ 0.4 dB/cm) silicon-rich silicon nitride waveguides and high Q microresonators (Qi ~ 106) featuring broadband anomalous dispersion. Microresonator combs are generated for the first time in this emerging material platform.

© 2018 The Author(s)

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