Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO_SI > 2018 > STh1I > STh1I.1

Photonic Damascene process with reflow step for ultra-smooth Si3N4 waveguides

Martin H. P. Pfeiffer, Junqiu Liu, Tiago Morais, Bahareh Ghadiani, and Tobias J. Kippenberg

Not Accessible

Your library or personal account may give you access

Abstract

We present ultra-smooth silicon nitride waveguides fabricated by the photonic Damascene process extended with a novel reflow step. This leads to record Q-factors for tightly confining waveguides with anomalous dispersion.

© 2018 The Author(s)

PDF Article
More Like This
Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

Clément Javerzac-Galy, Junqiu Liu, Arslan S. Raja, Tobias J. Kippenberg, Domenico De Fazio, Alisson Cadore, Ioannis Paradeisanos, Giancarlo Soavi, Gang Wang, and Andrea C. Ferrari
FW5E.5 Frontiers in Optics (FiO) 2018

Wafer-scale Manufacturing of Ultra-low Loss, High-density Si3N4 Photonic Integrated Circuits

Xinru Ji, Rui Ning Wang, Zheru Qiu, and Tobias J. Kippenberg
ce_8_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

Integrated Low Linewidth Brillouin Lasers in Ultra Low Loss Si3N4 Waveguide Platform

Daniel J. Blumenthal, Sarat Gundavarapu, Debapam Bose, Grant Brodnik, Taran Huffman, Ryan Behunin, and Peter Rakich
FW3E.3 CLEO: QELS_Fundamental Science (CLEO:FS) 2018

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use