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Enhanced Polling and Infiltration of Highly-Linear Mach-Zehnder Modulators on Si/SiN-Organic Hybrid Platform

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Abstract

Effective infiltration and polling of electro-optic polymer (EOP) inside world-record vertical slot of 40 nm is demonstrated for a Mach-Zehnder modulator on a hybrid Si/SiN/EOP platform with highly-linear and high-power handling performance capabilities.

© 2018 The Author(s)

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