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Foundry-compatible Hybrid Silicon / Lithium Niobate Electro-Optic Modulator

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Abstract

A foundry-compatible hybrid silicon-lithium niobate electro-optic modulator with an optical bandwidth greater than 6 GHz is presented. Wafer-scale photolithography processing is used to fabricate silicon features before bonding to a 600 nm lithium niobate film.

© 2018 The Author(s)

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