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Surface Micromachined MEMS-Tunable PIN-Photodiodes around 1550-nm

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Abstract

We report continuously widely tunable InP-based pin-photodiodes by integrating a surface micromachined MEMS-based Fabry-Pérot filter with FWHM/FSR of 0.3 nm/189 nm. Detection of 36 nm is obtained for WDM- or sensing-applications around 1550 nm.

© 2017 Optical Society of America

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