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Conferences > CLEO_SI > 2017 > STh1M > STh1M.8

Nanotriangle Decorated Silicon Nitride Waveguides for Integrated Surface-Enhanced Raman Spectroscopy

Pieter C. Wuytens, Andre G. Skirtach, and Roel Baets

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Abstract

Nanosphere lithography provides an e-beam free method for patterning gold nanoplasmonic antennas. By combining this technique with deep-UV photolithography, we fabricate Si3N4 waveguides interfaced to plasmonic antennas capable of exciting and collecting surface-enhanced Raman spectra.

© 2017 Optical Society of America

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