Abstract

Epitaxial, ultrathin (<10 nm) plasmonic TiN films are characterized using spectroscopic ellipsometry and Hall measurements. Thin films with thicknesses down to 2 nm remain highly metallic with a carrier concentration on the order of 1022 cm−3.

© 2017 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription