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Conferences > CLEO_SI > 2016 > STu3R > STu3R.7

High Yield Fabrication of SPSL-Based DUVLEDs on 6-inch Sapphire Substrates

L. Anderson, P. Atanackovic, T. Bray, S. Duvall, C. Escott, C. Flynn, A. Giussani, M. Godfrey, B. Hayden, M. Hiscocks, W. Lee, N. Patel, L. W. Sim, R. Singh, M. Stewart, J. Tang, and P. Toumbelekis

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Abstract

Deep ultraviolet light emitting diodes (DUVLEDs) are fabricated using plasma assisted molecular beam epitaxy (PA-MBE) AlGaN films grown on 6-inch c-plane sapphire substrates with focus on yield and external quantum efficiency (EQE).

© 2016 Optical Society of America

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