Abstract

The on-chip high performance plasmonic-CMOS waveguide based on hybrid Cu-SiO_2-Si platform operating at TE-mode is reported with the propagation loss ~0.5 dB/µm at the telecom wavelength. As an example, the ultracompact waveguide bend radius of 10 nm is achieved with ~0.1 dB/turn propagation loss and subsequently the sub-µm ring resonator filter of a radius of 0.2 µm is demonstrated with the excellent extinction ratio ~27 dB and insertion losses ~1 dB. This work will be useful to develop novel small footprint nanoscale electronic-photonic integrated circuits.

© 2016 Optical Society of America