3D Integrated Photonic Technologies for Future Functional Microsystems

S. J. Ben Yoo

doi:10.1364/CLEO_SI.2016.SM4G.6

Conference on Lasers and Electro-Optics
OSA Technical Digest (2016) (Optica Publishing Group, 2016),
paper SM4G.6
•https://doi.org/10.1364/CLEO_SI.2016.SM4G.6

3D Integrated Photonic Technologies for Future Functional Microsystems

S. J. Ben Yoo

CLEO: Science and Innovations 2016

San Jose, California United States
5–10 June 2016
ISBN: 978-1-943580-11-8

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Hybrid Silicon Photonics (SM4G)

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S. J. Ben Yoo, "3D Integrated Photonic Technologies for Future Functional Microsystems," in Conference on Lasers and Electro-Optics, OSA Technical Digest (2016) (Optica Publishing Group, 2016), paper SM4G.6.

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Abstract

This paper discusses 3D photonic integration technologies and fabrication processes towards realizing advanced functional microsystems. Their applications in computing, networking, sensing, imaging, and biomedicine will also be discussed.

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