Abstract
We present a scalable photonics process utilizing i-line lithography to achieve 2.46dB/cm propagation losses and multiple high-performance devices. Fiber support structures are lithographically aligned to gratings, enabling durable packaging of multiple fibers on a chip.
© 2016 Optical Society of America
PDF ArticleMore Like This
F. Bellei, D. Zhu, H. Choi, L. Archer, J. Mower, Dirk Englund, and Karl K. Berggren
FTu4C.3 CLEO: QELS_Fundamental Science (CLEO:FS) 2016
Rui Xiao, Liangqiu Zhu, Qingzhong Huang, and Jinsong Xia
AS3F.6 Asia Communications and Photonics Conference (ACP) 2016
Juniyali Nauriyal, Meiting Song, Marissa Granados-Baez, Yi Zhang, and Jaime Cardenas
M3A.2 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2022