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Conferences > CLEO_SI > 2016 > SF1P > SF1P.5

Patterning of ion-sliced lithium niobate for hybrid photonic integration on silicon

Li Chen, Jonathan T. Nagy, and Ronald M. Reano

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Abstract

We present a method to pattern ion-sliced LiNbO3 with controllable size, shape, and crystal orientation for integration on silicon. Measurements of hybrid silicon and LiNbO3 resonators with coplanar electrodes exhibit a 5.2 pm/V tunability.

© 2016 Optical Society of America

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