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Conferences > CLEO_SI > 2015 > SW4N > SW4N.1

Scaling Zero-Change Photonics: An Active Photonics Platform in a 32 nm Microelectronics SOI CMOS Process

Mark T. Wade, Fabio Pavanello, Jason Orcutt, Rajesh Kumar, Jeffrey M. Shainline, Vladimir Stojanović, Rajeev Ram, and Miloš A. Popović

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Abstract

We demonstrate photonics monolithically integrated in a 32 nm SOI microelectronics process, including grating couplers, tunable filters, and modulators, the first migration of zero-change CMOS photonics moving down the microelectronics technology-node ladder, from the 45 nm node.

© 2015 Optical Society of America

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