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Conferences > CLEO_SI > 2015 > STh3G > STh3G.2

Fabrication of Gray-Scale Semiconductor Structures with Dynamic Digital Projection Photochemical Etching

Kaiyuan Wang, Chris Edwards, Shailendra N. Srivastava, and Lynford L. Goddard

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Abstract

Digital projection photochemical etching is a novel single-step process for fabricating customized gray-scale semiconductor structures. Several features including a variable height pyramid array are fabricated, demonstrating the resolution, range, accuracy, and dynamics of the technique.

© 2015 Optical Society of America

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