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Conferences > CLEO_SI > 2015 > STh1H > STh1H.7

High-resolution sub-surface microscopy of CMOS integrated circuits using radially polarized light

M. Rutkauskas, C. Farrell, C. Dorrer, K. L. Marshall, T. R. Lundquist, P. Vedagarbha, and D. T. Reid

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Abstract

Comparison of high-resolution sub-surface microscopy shows that illumination with linear polarization resolves an edge with resolutions of 95 nm and 120 nm, depending on E-field orientation, while radial polarization achieves a resolution of 98 nm.

© 2015 Optical Society of America

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