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Silicon cabride nanobeam cavities with high Q/V

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Abstract

We demonstrate photonic-crystal nanobeam cavities in amorphous SiC. The fundamental mode exhibits intrinsic-Q of 7.69×104 with mode volume of 0.60(λ/n)3. This is, to the best of our knowledge, the highest Q/V value in SiC cavities.

© 2015 Optical Society of America

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