Todays terahertz instrumentation lacks cost-effective sources and detectors compatible with standard microelectronics to drive down the system cost. This paper presents recent developments based on silicon process technologies and discusses the challenges in implementing source and detectors. It presents a 530 GHz source array with up to 1 mW radiated power, a 1024-pixel CMOS camera, and a heterodyne 830 GHz imaging chip-sets.

© 2014 Optical Society of America

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