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High fidelity, general reflection-mode coherent diffractive imaging with a tabletop EUV source

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Abstract

We demonstrate the most general, highest fidelity, reflection mode coherent diffractive imaging to date. By combining tabletop high harmonics with ptychography and keyhole coherent diffraction techniques, images are reconstructed with < 3 nm axial resolution.

© 2014 Optical Society of America

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