We compared different on-chip silicon based absorption sensors for the detection of xylene in water in both near-infrared and mid-infrared with detection limit down to 1ppb. Strip waveguide, slot waveguide and PC-based chip integrated optical absorption spectroscopy devices are compared in near-infrared and mid-infrared. The results provide a route for enhanced sensitivity while retaining device miniaturization.

© 2014 Optical Society of America

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