Low-loss nonlinear AlGaAs waveguides are fabricated using plasma-assisted photoresist reflow. A 6.8-dB continuous-wave four-wave mixing conversion efficiency in a 1.35-μm-wide waveguide, and a 44-nm half-width 3-dB bandwidth in a 0.65-μm-wide waveguide are demonstrated.

© 2014 Optical Society of America

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