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Conferences > CLEO_SI > 2014 > SM2H > SM2H.7

Modeling and Optimization of Magnesiothermically formed Porous Silicon in Silicon on insulator Microresonator Sensors

Zhixuan Xia, Ali A. Eftekhar, Qing Li, Ali Adibi, Stan C. Davis, Ari S. Gordin, and Kenneth H. Sandhage

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Abstract

We develop a model for silicon on insulator microresonators with magnesiothermically formed porous silicon cladding possessing three dimensional interconnected pores. Investigation of waveguide design and geometrical parameters indicates an optimized areal mass sensitivity of ~ 0.2 pm/(pg/mm2).

© 2014 Optical Society of America

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