Integrated silicon optomechanical transducers and their application in atomic force microscopy

Jie Zou; Jie Zou; Houxun Miao; Houxun Miao; Thomas Michels; Thomas Michels; Vladimir Aksyuk

doi:10.1364/CLEO_SI.2014.SF2M.7

CLEO: 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper SF2M.7
•https://doi.org/10.1364/CLEO_SI.2014.SF2M.7

Integrated silicon optomechanical transducers and their application in atomic force microscopy

Jie Zou, Houxun Miao, Thomas Michels, and Vladimir Aksyuk

CLEO: Science and Innovations 2014

San Jose, California United States
8–13 June 2014
ISBN: 978-1-55752-999-2

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Optomechanics II (SF2M)

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J. Zou, H. Miao, T. Michels, and V. Aksyuk, "Integrated silicon optomechanical transducers and their application in atomic force microscopy," in CLEO: 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper SF2M.7.

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Abstract

We present integrated optomechanical transducers with exposed tips and demonstrate ultrahigh force sensitivity and large bandwidth. The transducer is implemented as an atomic force microscope probe in the contact mode and nanoscale resolution is demonstrated.

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