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Femtosecond laser tuning of Si microring resonators by surface amorphization through a thick SiO2 cladding

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Abstract

Single femtosecond laser pulses are used to modify the surface of c-Si waveguides clad by SiO2 for permanent tuning of microring resonators. Positive, controllable resonance shifts that vary with fluence are demonstrated, inducing little loss.

© 2014 Optical Society of America

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