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Doping Position Control of Nitrogen-vacancy Centers in Diamond using Nitrogen-doped Chemical Vapor Deposition on Micropatterned Substrate

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Abstract

We demonstrate lateral position control of nitrogen-vacancy centers doped near the surface of diamond substrate using micropatterned substrate for nitrogen-doped isotopically-enriched chemical vapor deposition. We confirm the spatially-selective doping of NV centers on etched area. We also found the nitrogen-vacancy creation efficiency at the etched area is much higher than that at the non-etched area of diamond substrate.

© 2013 Optical Society of America

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