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Conferences > CLEO_SI > 2012 > CW3M > CW3M.4

Phase noise of high Q silicon nitride nanomechanical resonators

King Y. Fong, Wolfram H. P. Pernice, and Hong X. Tang

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Abstract

We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.

© 2012 Optical Society of America

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