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Conferences > CLEO_SI > 2012 > CTh3D > CTh3D.3

Influence of anisotropic diffusion of Ga and Al atoms during AlGaAs growth for periodically-inverted AlGaAs waveguides

Tomonori Matsushita, Shigeki Yoshida, Junya Ota, and Takashi Kondo

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Abstract

We have investigated a quasi-phase-matching AlGaAs waveguide using cathodoluminescence spectroscopy and atomic force microscopy. We found that the anisotropic diffusion of Al/Ga atoms causes Al-composition modulation as well as interface corrugations.

© 2012 Optical Society of America

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