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Conferences > CLEO_SI > 2012 > CM3A > CM3A.4

Backend monolithic integration of passive optical devices on 90nm bulk CMOS chip

Yoon Ho Daniel Lee and Michal Lipson

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Abstract

We demonstrate optical resonators and waveguides monolithically integrated on a CMOS die through post-backend processing. Both CMOS process integrity and optical performance are verified and measured.

© 2012 Optical Society of America

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