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Feasibility of Multimode Polycrystalline Waveguides/Devices: Record Low Propagation Loss and Uniform 1×12 MMI Fanout

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Abstract

We investigate the loss dependence of multimode polysilicon waveguide widths, achieving a record low propagation loss of 3 dB/cm as well as demonstrating a low loss and high uniformity 1×12 multimode interference (MMI) beam splitter.

© 2012 Optical Society of America

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