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Conferences > CLEO_SI > 2012 > CM1M > CM1M.6

Fabrication of High-Q Microresonators using Femtosecond Laser Micromachining

Kazunari Tada, Gregory Cohoon, Khanh Kieu, Masud Mansuripur, and Robert A. Norwood

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Abstract

We report a novel technique to fabricate microdisk resonators using femtosecond laser micromachining. The resonators had suppressed higher order modes with a measured Q-factor as high as 7.8 × 106.

© 2012 Optical Society of America

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