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Conferences > CLEO_SI > 2012 > CM1M > CM1M.2

Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond

Michael J. Burek, Brendan J. Shields, Nathalie de Leon, Birgit M. Hausmann, Yiwen Chu, Qimin Quan, Mikhail Lukin, and Marko Lončar

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Abstract

A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology, employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.

© 2012 Optical Society of America

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