We report a fully-integrated MEMS sensing platform enabled by cavity optomechanics. We demonstrate 4.6 fm/Hz1/2 displacement sensitivity for sub-µW input power, electrostatically-tunable readout gain, and feedback damping of mechanical response by a factor of >1000.

© 2012 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription