Toward Flexible Wafer-Size 3D Photonic Crystal Templates Fabricated by Scanning Holographic Lithography

Liang (Leon) Yuan; Peter R. Herman

doi:10.1364/CLEO_SI.2011.CML5

CLEO:2011 - Laser Applications to Photonic Applications
OSA Technical Digest (CD) (Optica Publishing Group, 2011),
paper CML5
•https://doi.org/10.1364/CLEO_SI.2011.CML5

Toward Flexible Wafer-Size 3D Photonic Crystal Templates Fabricated by Scanning Holographic Lithography

Liang (Leon) Yuan and Peter R. Herman

CLEO: Science and Innovations 2011

Baltimore, Maryland United States
1–6 May 2011
ISBN: 978-1-55752-910-7

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3D Nano Fabrication (CML)

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L. (L. ) Yuan and P. R. Herman, "Toward Flexible Wafer-Size 3D Photonic Crystal Templates Fabricated by Scanning Holographic Lithography," in CLEO:2011 - Laser Applications to Photonic Applications, OSA Technical Digest (CD) (Optica Publishing Group, 2011), paper CML5.

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Abstract

Parallel linear scanning laser exposure of diffractive optical elements is engineered to produce seamless stitching of thick 3D photonic crystal templates over large area and offer bandgap tuning, chirping, apodization and optofluidic integration.

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