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Fabrication of Stepped and Reflowed 3-D Profiles for Optical Applications by Dose-modulated Electron Beam Lithography and Selective Thermal Reflow

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Abstract

Microlens and prism arrays were fabricated using multi-level electron beam patterning combined with thermal reflow. The molecular weight dependent processing allows selective transfer of stepped into sloped resist structures with smooth surfaces.

© 2011 Optical Society of America

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