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Three-Dimensional Laser Lithography with Conceptually Diffraction-Unlimited Lateral and Axial Resolution

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Abstract

By transferring concepts from stimulated-emission-depletion microscopy to Direct Laser Writing, we improved its lateral and axial resolution significantly. Thus, woodpile photonic crystals with 300-nm lateral rod spacing can be fabricated routinely.

© 2011 Optical Society of America

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