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Robust Mid-Infrared Photothermal Imaging System for Characterization of Thin Films at High Spatial Resolution

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Abstract

We demonstrate robust performance of a mid-infrared photothermal imaging system with sensitive detection. Imaging of a patterned thin film shows a resolving power of 3.1 µm, below the diffraction-limited spot size of the pump beam.

© 2017 Optical Society of America

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