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Tuning of silicon photonic crystal split-beam nanocavity through its intrinsic structural deformation

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Abstract

We demonstrate the silicon photonic crystal split-beam nanocavity with an optical Q-factor of 7000. Half of the cavity is actuated by nano-electro-mechanical systems enlarging the air gap, thus causing the overall 0.81nm resonant wavelength shift.

© 2016 Optical Society of America

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