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Conferences > CLEO_Europe > 2021 > cm_p > cm_p_19
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_p_19

Formation of thermochemical laser-induced periodic surface structures on zirconium films by focused femtosecond laser beam

Kirill Bronnikov, Alexander Dostovalov, Konstantin Okotrub, Viktor Korolkov, and Sergey Babin

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Abstract

Periodic structures were formed on zirconium films with a thickness of 50-170 nm using near-IR femtosecond laser pulses. The dependency of the period and structure uniformity on pulse energy and scanning rate was observed.

© 2021 IEEE

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