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Conferences > CLEO_Europe > 2021 > ce_5 > ce_5_2
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper ce_5_2

Nanoimprint Lithography for the Replication of Optical Microstructures on Azopolymer Thin Films

Jonas Strobelt, Daniel Stolz, Maximilian Leven, Luke Kurlandski, and David J. McGee

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Abstract

A new process for the replication of optical microstructures is reported. It combines microstructure fabrication on azopolymer films with nanoimprint lithography. Comparisons of the original microstructure and the final replica show excellent reproduction fidelity.

© 2021 IEEE

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