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Conferences > CLEO_Europe > 2021 > cd_p > cd_p_28
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cd_p_28

TI-REX: A Tunable Infrared laser for Experiments in nanolithography

Zeudi Mazzotta, Jan Mathijssen, Kjeld Eikema, Oscar Versolato, and Stefan Witte

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Abstract

TI-REX is a nanosecond mid-IR light source, with spectral tunability from 1.45 to 4.5m, pulse energy up to 100mJ, and accurate temporal pulse shape control, and a great future tool for plasma-based extreme-ultraviolet generation studies.

© 2021 IEEE

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