Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • 2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference
  • (Optica Publishing Group, 2017),
  • paper CE_P_11

Amorphous hydrogenated silicon carbonitride as low refractive index material in optical MEMS applications

Not Accessible

Your library or personal account may give you access

Abstract

Microelectromechanical systems (MEMS) currently see a trend towards inclusion of optical functionalities, i.e., towards microoptoelectromechanical systems (MOEMS). However, typical MEMS materials such as silicon, silicon oxide and silicon nitride limit the choice of available refractive indices and spectral operating regions. Particularly, a low refractive index material is highly desirable which is usable in conjunction with high refractive index silicon, e.g., in distributed Bragg reflectors (DBRs) and which is not etched in an HF release step for releasing movable structures. Furthermore, MEMS applications typically need a careful control of the residual mechanical stress in free-standing structures. For this purpose, we present hydrogenated amorphous silicon carbonitride (a-SiCN:H) thin-films deposited by plasma-enhanced chemical vapour deposition (PECVD) from SiH4, CH4 and NH3 and show its beneficial properties for optical layers in MOEMS.

© 2017 IEEE

PDF Article
More Like This
The tailored complex refractive index of hydrogenated amorphous silicon for dielectric metasurfaces

Younghwan Yang, Gwanho Yoon, Sunghak Park, Seok Daniel Namgung, Ki Tae Nam, and Junsuk Rho
JTu1A.5 Frontiers in Optics (FiO) 2020

Hydrogenated amorphous silicon microcavity

Ali Serpengiizel
CPD1.8 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2000

Telecommunications Band Photoluminescence from Hydrogenated Amorphous Silicon Ring Resonators

Michael G. Wood, Ryan J. Patton, and Ronald M. Reano
SM2K.7 CLEO: Science and Innovations (CLEO:S&I) 2017

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved